Compound microscope device

摘要

A compound microscope device allows simultaneous observation of one specimen by a transmission electron microscope and an optical microscope. The compound microscope device 1 of the present invention has a transmission electron microscope 2 and an optical microscope 4. A specimen 10 and a reflection mirror 41 are disposed on an electron optical axis C of an electron ray. The reflection mirror 41 is inclined from the electron optical axis C toward the optical object lens 43 and the specimen 10. Light from the specimen 10 (fluorescent light, reflection light, and the like) is reflected by the reflection mirror 41 and enters into the optical object lens 43. The electron ray from the electron microscope 2 passes through a mounting center hole 42 of the reflection mirror 41. This makes it possible to observe one specimen simultaneously by the electron microscope 2 and the optical microscope 4.

主权项

1. A compound microscope device comprising:
a transmission electron microscope including an electron gun that releases an electron ray toward a specimen, an electromagnetic object lens that images the electron ray, and a detection part into which the electron ray, having passed through the electromagnetic object lens, enters; a fluorescent microscope including a light source that emits excitation light to irradiate the specimen, a light object lens that collects fluorescent light emitted from the specimen, and a light detection part into which the fluorescent light is entered; and a reflection mirror arrangement that comprises one reflection mirror including a mounting center hole larger in diameter than a beam diameter of the electron ray, wherein the electromagnetic object lens is formed by a cylindrical coil and a yoke covering the coil, the yoke has a notch constituting a pole piece, the one reflection mirror of the reflection mirror arrangement is disposed on an electron-optical path between upper and lower poles of the pole piece, the electron ray passes through the mounting center hole of the one reflection mirror, the excitation light is reflected by the reflection mirror arrangement toward the specimen, the fluorescent light is reflected by the one reflection mirror toward the light object lens, electron ray irradiation and excitation light irradiation are coaxially performed on the specimen, and simultaneous observation is made by the electron microscope and the fluorescent microscope.