| 摘要 |
PROBLEM TO BE SOLVED: To improve the accuracy of polishing end point detection.SOLUTION: In an end point detection method, an end point is detected based on a driving current which is supplied to a driving unit (first electric motor or second electric motor) for rotating and driving a polishing table for holding a polishing pad, or a holding unit (top ring) for holding a polishing object and pressing the polishing object against the polishing pad. The end point detection method includes: a step (S102) for judging whether polishing conditions of a polishing process to be executed accord with preset specified polishing conditions or not; a step (S103) for adjusting a current control parameter concerning a change in the driving current to a change in a driving load of the driving unit in a driving control unit (motor driver) for controlling the driving current when it is judged that the polishing conditions accord with the specified polishing conditions; and a step (S105) for detecting a driving current which is supplied to the driving unit based on the adjusted current control parameter, and detecting the end point of the polishing based on the detected driving current.SELECTED DRAWING: Figure 8 |
