AUTOMATIC SAMPLE PIECE MANUFACTURING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide an apparatus for automatizing an operation for extracting and transferring into a sample piece holder, a sample piece formed by processing of a sample by an ion beam.SOLUTION: An automatic sample piece manufacturing apparatus 10 includes a computer 21 for controlling charged particle beam irradiation optical systems 14, 15 and sample piece transfer means so that a template of a columnar part is produced based on a columnar image acquired by irradiation of a charged particle beam, and that the sample piece is transferred to the columnar part based on positional information obtained by template matching using the template.SELECTED DRAWING: Figure 1