PART FOR SEMICONDUCTOR MANUFACTURING DEVICE, AND METHOD FOR MANUFACTURING THE SAME

摘要

Provided are: a component for a semiconductor manufacturing device, capable of inhibiting a temperature deviation of a main body substrate installed with a heating element by inhibiting the deviation of the thickness or the width of the heating element; and a manufacturing method thereof. A manufacturing method of an electrostatic chuck (component for a semiconductor manufacturing device) comprises: an application process for applying a photosensitive metal paste (410) which is a heating element material on the top of a ceramic green sheet (110E) to be a main body substrate; a light exposure developing process for forming an intermediate heating element (410a) which is the heating element on the top of the ceramic green sheet (110e) by exposing light and developing the photosensitive metal paste (410) on the top of the ceramic green sheet (110e); and a plasticization process for forming the main body substrate and the heating element by simultaneously plasticizing the ceramic green sheet (110e) and the intermediate heating element (410a).