| 摘要 |
PURPOSE:To detect the rectilinear acceleration in all directions of x, y, and z and the rotary acceleration around one axis and, at the same time, miniaturize a device, reduce wiring distance for preventing noise from intruding by constituting center beams by combining first to fourth beams three-dimensionally and then laying out a semiconductor chip at the space. CONSTITUTION:With a sensor circuit substrate 4 as the substrate, a semiconductor chip 41 is mounted on a sensor circuit substrate surface 4a and a sensor beam 2 is mounted on a sensor circuit substrate reverse side 4b. A conductive wires 46 are provided on the surface 4a and the reverse side 4b and the chip 41 and the beam 2 are connected. A support part 27 which is not deformed by acceleration is provided on the center x and z surfaces of the beams 2. With the support part 27 as the fixed edge, cantilever 21 and 22 are provided on the x and z surfaces. The beams 21 and 22 detect the rectilinear acceleration in y direction and the rotary acceleration at the center of the z axis. With an area near the tip of the beams 21 and 22 as the fixed edge, the cantilever beams 23 and 24 are provided obliquely. The beams 23 and 24 detect not only the acceleration in x direction and that in z direction but also that in all directions on the x and z-axis surfaces. |
