发明名称 CIRCULATING WATER SUPPLY SYSTEM AND CIRCULATING WATER SUPPLY METHOD
摘要 PROBLEM TO BE SOLVED: To provide a circulating water supply system capable of suppressing a piping trouble resulting from gas in a piping, and a circulating water supply method.SOLUTION: According to one embodiment, a circulating water supply system comprises: a circulating water tank which stores circulating water; a first piping through which the circulating water is sent from the circulating water tank to one or more manufacturing devices; and a second piping through which the circulating water is returned from the one or more manufacturing devices to the circulating water tank. Furthermore, the system includes: a pressure detector which detects a pressure of gas in the second piping; a control valve provided on a piping between the second piping and the circulating water tank; and a control unit which controls an opening of the control valve on the basis of the pressure of the gas detected by the pressure detector.SELECTED DRAWING: Figure 1
申请公布号 JP2016051880(A) 申请公布日期 2016.04.11
申请号 JP20140178126 申请日期 2014.09.02
申请人 TOSHIBA CORP 发明人 YOSHIZU TAKASHI
分类号 H01L21/205;F25D9/00;H01L21/3065;H05K7/20 主分类号 H01L21/205
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