摘要 |
Systems and methods for a multi-speed programmable batch scrubber are illustrated. The disclosed system includes a brush configured to scrub a disk at a plurality of speeds during cleaning of the disk, a combing system configured to support the disk during cleaning, a cleaning solution dispenser, and a first deionized water dispenser configured to dispense water on the brush during cleaning. The disk is cleaned in a plurality of predetermined cleaning steps, each step including predetermined parameter values such as the brush RPM, the step duration, the dispensing state of the cleaning solution dispenser, and the dispensing state of the deionized water dispenser. |