| 发明名称 |
MASS MICROSCOPE APPARATUS |
| 摘要 |
A mass microscope apparatus includes: a measuring unit including an ionization unit configured to ionize a sample present in an observation region, and a mass spectrometry unit configured to perform mass spectrometry of ions generated by the ionization unit; an object moving device configured to relatively move the observation region as to the sample; and a switching unit configured to switch measurement conditions of the measuring unit depending on whether the mass microscope apparatus is operating in a moving measurement mode where the observation region is moved by the object moving device to sequentially perform measurement by the measuring unit, and a stationary measurement mode where the observation region is stationary and measurement is performed by the measuring unit. |
| 申请公布号 |
US2016099139(A1) |
申请公布日期 |
2016.04.07 |
| 申请号 |
US201514874106 |
申请日期 |
2015.10.02 |
| 申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
Kyogaku Masafumi |
| 分类号 |
H01J49/40;H01J37/26;H01J49/06;H01J49/10;H01J37/20 |
主分类号 |
H01J49/40 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A mass microscope apparatus comprising:
a measuring unit including
an ionization unit configured to ionize a sample present in an observation region, anda mass spectrometry unit configured to perform mass spectrometry of ions generated by the ionization unit; an object moving device configured to relatively move the observation region as to the sample; and a switching unit configured to switch measurement conditions of the measuring unit depending on whether the mass microscope apparatus is operating in
a moving measurement mode where the observation region is moved by the object moving device to sequentially perform measurement by the measuring unit, anda stationary measurement mode where the observation region is stationary and measurement is performed by the measuring unit. |
| 地址 |
Tokyo JP |
