| 摘要 |
The present invention provides a stereoscopic-image observation/processing technique having a desired quantitative level and capable of observation and data analysis in a short period of time. This spatial-structure observation/processing method, using a charged-particle beam apparatus, comprises: rotating a specimen held in a specimen holder of the apparatus in approximately 120° steps to three angular positions about a rotation axis 22 defined as a direction tilted by approximately 54.7° relative to an optical axis 2 of the apparatus; and performing spatial-structure observation or processing of the specimen disposed at an intersection 21 from three directions orthogonal to one another. |
