| 摘要 |
PROBLEM TO BE SOLVED: To provide a sensor element having good sensor characteristics, and a sensor device, electronic equipment and a mobile body including the sensor element and having high reliability.SOLUTION: A sensor element 2 includes a base part 21, a pair of vibration arms 221, 222 for drive, a pair of vibration arms 231, 232 for detection, a pair of support parts 251, 252, and two suspension arms 261, 262. The base part 21 includes a first part 211 that is relatively long in a y-axial direction and a second part 212 that is shorter in the y-axis direction shorter than the first part 211. The support parts 251, 252 have elongated shapes extending in the y-axis direction and are arranged as separated from each other in an x-axis direction. The vibration arms 221, 222 for drive and the vibration arms 231, 232 for detection each extend from the first part 211, while the suspension arms 261, 262 extend from the second part 212.SELECTED DRAWING: Figure 2 |
