| 摘要 |
PROBLEM TO BE SOLVED: To provide a physical quantity sensor, electronic equipment and a mobile body, which have high mechanical strength.SOLUTION: A physical quantity sensor 1 comprises: a package 10 that includes a base substrate 2 and a cap 3 and has an inner space S inside; and a functional element 4 accommodated in the inner space S. The cap 3 has a communication hole 33, which is formed in a partition wall part 32 disposed around the inner space S in a plan view and communicates a lower surface 3a on the base substrate 2 side and an upper surface 3b on an opposite side to the base substrate 2; and the communication hole 33 is communicated to the inner space S via a groove 24 formed in the base substrate 2.SELECTED DRAWING: Figure 1 |
