MULTIPLE TEMPERATURE RANGE SUSCEPTOR, ASSEMBLY, REACTOR AND SYSTEM INCLUDING THE SUSCEPTOR, AND METHODS OF USING THE SAME

摘要

Susceptor assemblies, reactors and systems including the assemblies, and methods of using the assemblies, reactors, and systems are disclosed. Exemplary susceptor assemblies include two or more sections that can be moved relative to each other to allow rapid changes in a substrate temperature. The movement of the two or more sections can additionally or alternatively be used to manipulate conductance of gas flow though a reactor.

主权项

1. A susceptor assembly comprising:
a susceptor first section formed of a first material; a susceptor second section formed of a second material; and a mechanism to move the susceptor first section relative the susceptor second section, wherein the susceptor first section is movable relative to the susceptor second section to provide variable heat to a substrate.