发明名称 THREE DIMENSIONAL MEMORY DEVICE HAVING COMB-SHAPED SOURCE ELECTRODE AND METHODS OF MAKING THEREOF
摘要 A monolithic three dimensional memory device includes a comb-shaped electrode within a trench, where the electrode includes an elongated continuous portion of an electrically conductive material that is raised from a major surface of a substrate and a plurality of second portions that include spaced-apart conductive pillars extending between the continuous portion and the major surface of the substrate. A fill material, such as a dielectric material, is located between the plurality of second portions.
申请公布号 WO2016053623(A2) 申请公布日期 2016.04.07
申请号 WO2015US50352 申请日期 2015.09.16
申请人 SANDISK TECHNOLOGIES INC. 发明人 TAKEGUCHI, NAOKI
分类号 H01L27/115 主分类号 H01L27/115
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