MEMS SENSOR MODULE, VIBRATION DRIVING MODULE, AND MEMS SENSOR

摘要

A MEMS sensor module of the present invention, in particular, a vibration driving module includes: a movable electrode supported such that the movable electrode is able to be vibrated, the movable electrode extending in a vibration direction; a fixed electrode provided substantially in parallel with the movable electrode and extending in the vibration direction; a plurality of projection portions provided side by side on a facing wall surface of the movable electrode in the vibration direction, the facing wall surface of the movable electrode facing the fixed electrode; and a plurality of projection portions provided on a facing wall surface of the fixed electrode, the facing wall surface of the fixed electrode facing the movable electrode, the plurality of projection portions of the fixed electrode facing the projection portions of the movable electrode.

主权项

1. A MEMS sensor module, comprising:
a movable electrode which translates back and forth along an axis of movement; first and second stationary electrodes facing first and second portions of the movable electrode, respectively; a plurality of first projections extending from the movable electrode toward the first stationary electrode; a plurality of second projections extending from the movable electrode toward the second stationary electrode; a plurality of third projections extending from the first stationary electrode toward the first portion of the movable electrode such that each of the third projections partially overlaps a respective one of the second projections; and a plurality of fourth projections extending from the second stationary electrode toward the second portion of the movable electrode such that each of the fourth projections partially overlaps a respective one of the second projections; the first and third plurality of projections, on the one hand, and the second and fourth plurality of projections, on the other, partially overlapping one another in opposite directions.