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发明名称
ナノインプリント用テンプレート及びその製造方法
摘要
申请公布号
JP5899931(B2)
申请公布日期
2016.04.06
申请号
JP20120001180
申请日期
2012.01.06
申请人
大日本印刷株式会社
发明人
石川 幹雄;福田 雅治;河野 佑介;伊藤 公夫
分类号
H01L21/027;B29C33/38;B29C59/02
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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