发明名称 |
Formation of metal nanospheres and microspheres |
摘要 |
Hemispheres and spheres are formed and employed for a plurality of applications. Hemispheres are employed to form a substrate having an upper surface and a lower surface. The upper surface includes peaks of pillars which have a base attached to the lower surface. The peaks have a density defined at the upper surface by an array of hemispherical metal structures that act as a mask during an etch to remove substrate material down to the lower surface during formation of the pillars. The pillars are dense and uniform and include a microscale average diameter. The spheres are formed as independent metal spheres or nanoparticles for other applications. |
申请公布号 |
GB2508748(B) |
申请公布日期 |
2016.04.06 |
申请号 |
GB20140003424 |
申请日期 |
2012.08.29 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
AUGUSTIN J HONG;WOO-SHIK JUNG;JEEHWAN KIM;JAE-WOONG NAH;DEVENDRA K SADANA |
分类号 |
H01L31/0352;H01L51/40;H01L51/42 |
主分类号 |
H01L31/0352 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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