发明名称 ANALYSIS DEVICE AND ANALYSIS METHOD
摘要 The analysis apparatus 10 includes a plasma generation device 11 and an optical analysis device 13. The plasma generation device 11 generates initial plasma by energizing a substance in space to be turned into a plasma state, and maintains the plasma state by irradiating the initial plasma with electromagnetic wave for a predetermined period of time. Then, the optical analysis device 13 analyzes the target substance 15 based on a time integral value of intensity of emission from the target substance 15 in an electromagnetic wave plasma region, which is maintained by the electromagnetic wave.
申请公布号 EP2618132(A4) 申请公布日期 2016.04.06
申请号 EP20110825140 申请日期 2011.09.12
申请人 IMAGINEERING, INC. 发明人 IKEDA YUJI;TURUOKA RYOJI
分类号 G01N21/63;G01J3/02;G01J3/443;G01N21/67;G01N21/68;G01N21/71 主分类号 G01N21/63
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