| 摘要 |
PROBLEM TO BE SOLVED: To provide an acceleration sensor which can suppress the degradation in detection accuracy while reducing an influence of thermal strain.SOLUTION: A movable part 20 including movable electrodes 25a and 25b which are arranged apart from a support substrate 11 in a normal direction to a surface direction of the support substrate 11 and are rotatable in response to an acceleration applied in the normal direction, and lower electrodes 71 and 72 arranged so as to face the movable electrodes 25a and 25b are provided on the support substrate 11. Further, fixed parts 30 and 40 having fixed electrodes 32 and 42 which are arranged apart from the lower electrodes 71 and 72 in the normal direction to constitute capacities equal to capacities constituted between the movable electrodes 25a and 25b and the lower electrodes 71 and 72, between the fixed electrodes 32 and 42 themselves and the lower electrodes 71 and 72 are provided on the support substrate 11. An acceleration is detected on the basis of the difference between the capacities constituted between the movable electrodes 25a and 25b and the lower electrodes 71 and 72 and the capacities constituted between the fixed parts 32 and 42 and the lower electrodes 71 and 72. |
