摘要 |
PROBLEM TO BE SOLVED: To provide a silicone polymer having excellent resist suitability.SOLUTION: A silicone skeleton-containing polymer compound has repeating units represented by general formula (1) and has a weight average molecular weight of 3,000-500,000, where X is a bisphenol compound residue, Y is a bisphenol glycidyl ether compound residue, and W is a triphenyl dihydroxy compound residue. |