发明名称 Semiconductor chip
摘要 A sensor chip comprises a substrate (1) and a stack (2) of insulating layers arranged on the substrate. In a centre area (CA) of the sensor chip a sensing element (3) is arranged, as well as a circuit (21) in the stack (2) for electrically connecting the sensing element (3). Between the centre area (CA) and an edge (ED) of the sensor chip a seal ring (SR) and an optical inspection area (OI) are provided. The technique can also be applied with other types of semiconductor chips.
申请公布号 EP3002786(A1) 申请公布日期 2016.04.06
申请号 EP20140003420 申请日期 2014.10.03
申请人 SENSIRION AG 发明人 BARTSCH, ULRICH;STUDER, MATTHIAS;DANKERL, MARKUS
分类号 H01L23/58;H01L21/78;H01L23/00 主分类号 H01L23/58
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