发明名称 |
Semiconductor chip |
摘要 |
A sensor chip comprises a substrate (1) and a stack (2) of insulating layers arranged on the substrate. In a centre area (CA) of the sensor chip a sensing element (3) is arranged, as well as a circuit (21) in the stack (2) for electrically connecting the sensing element (3). Between the centre area (CA) and an edge (ED) of the sensor chip a seal ring (SR) and an optical inspection area (OI) are provided. The technique can also be applied with other types of semiconductor chips. |
申请公布号 |
EP3002786(A1) |
申请公布日期 |
2016.04.06 |
申请号 |
EP20140003420 |
申请日期 |
2014.10.03 |
申请人 |
SENSIRION AG |
发明人 |
BARTSCH, ULRICH;STUDER, MATTHIAS;DANKERL, MARKUS |
分类号 |
H01L23/58;H01L21/78;H01L23/00 |
主分类号 |
H01L23/58 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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