| 摘要 |
PROBLEM TO BE SOLVED: To provide a fluid suction device for enabling a container for gas liquid separation to be installed in a processing apparatus.SOLUTION: The fluid suction device used in a processing apparatus includes: a suction source; a pipe for connecting an area to be sucked of the processing apparatus to the suction source; a gas liquid separation container provided halfway through the pipe, for separating gas and liquid flowing through the pipe from each other; draining means for draining liquid separated and stored in the gas liquid separation container, from the gas liquid separation container; and a water level sensor for detecting a water level of the liquid stored in the gas liquid separation container. The draining means includes: a draining ejector for generating negative pressure by gas supplied from a gas supply source, and sucking and draining the liquid in the gas liquid separation container; and adjusting means for adjusting a flow rate of gas to be supplied to the draining ejector according to the water level detected by the water level sensor, thus regulating the amount of drainage of the draining ejector, and keeping the water level in the gas liquid separation container within a predetermined range.SELECTED DRAWING: Figure 5 |
