BOARD PROCESSING APPARATUS AND BOARD PROCESSING METHOD

摘要

When a board and a board holder are soaked into a processing liquid, the reduction of temperature of the processing liquid can be suppressed without degrading the throughput of board processing. A board processing apparatus of the invention comprises: a holder cabinet 41 for keeping a board holder 80; and a heating device 44 that is disposed in the holder cabinet 41 and that is configured to heat the board holder 80 kept in the holder cabinet 41.