MICRO PICK UP ARRAY PIVOT MOUNT DESIGN FOR STRAIN AMPLIFICATION

摘要

Systems and methods for aligning a transfer head assembly with a substrate are disclosed. In an embodiment a pivot mount is used for generating a feedback signal in a closed-loop motion control system. In an embodiment, the pivot mount includes primary spring arms and secondary spring arms extending between a pivot platform and a base of the pivot mount. The secondary spring arms are characterized by a lower stiffness than the primary spring arms, and strain sensing elements are located along the secondary spring arms.

主权项

1. A pivot mount comprising:
a pivot platform; a base; a primary spring arm fixed to the pivot platform at a primary inner root, fixed to the base at a primary outer root, and characterized by a corresponding primary axis length spanning between the primary outer root and primary inner root; and a secondary spring arm fixed to the pivot platform at a secondary inner root, fixed to the base at a secondary outer root, and characterized by a secondary axis length spanning between the secondary outer root and secondary inner root; and a strain sensing element along the secondary spring arm; wherein the secondary spring arm is characterized as having a lower stiffness than the primary spring arm.