PIEZOELECTRIC COMPOSITION, PIEZOELECTRIC ELEMENT AND SPUTTERING TARGET

摘要

The present invention aims to provide a piezoelectric composition containing a composition represented by formula (5) as the main component, wherein the composition represented by formula (5) contains a first perovskite-type oxide represented by formula (1), a second perovskite-type oxide represented by formula (2), a tungsten bronze-type oxide represented by formula (3) and a third perovskite-type oxide represented by formula (4), (K1-x-yNaxLiy)q(Nb1-zTaz)O3 (1), SrZrO3 (2), Ba(Nb1-wTaw)2O6 (3), (Bi0.5Na0.5)TiO3 and/or (Bi0.5K0.5)TiO3 (4), (1-m-n-p)A+mB+nC+pD (5); in formula (1), 0.20≦x≦0.80, 0.02≦0.10, 0.01≦z≦0.30 and 0.800≦q≦1.050; in formula (3), 0.01≦w≦0.30; and in formula (5), A represents the composite oxide represented by formula (1), B represents the composite oxide represented by formula (2), C represents the composite oxide represented by formula (3), D represents the composite oxide represented by formula (4), and 0.04≦m≦0.07, 0≦n≦0.010 and 0.001≦p≦0.020.

主权项

1. A piezoelectric composition comprising a composition represented by formula (5) as the main component,
wherein, the composition represented by formula (5) comprises a first perovskite-type oxide represented by the following formula (1), a second perovskite-type oxide represented by the following formula (2), a tungsten bronze-type oxide represented by the following formula (3) and a third perovskite-type oxide represented by the following formula (4),
(K1-x-yNaxLiy)q(Nb1-zTaz)O3  (1)SrZrO3  (2)Ba(Nb1-wTaw)2O6  (3)(Bi0.5Na0.5)TiO3 and/or (Bi0.5K0.5)TiO3  (4)(1-m-n-p)A+mB+nC+pD  (5) wherein, in formula (1), 0.20≦x≦0.80, 0.02≦y≦0.10, 0.01≦z≦0.30 and 0.800≦q≦1.050,in formula (3), 0.01≦w≦0.30,
in formula (5), A represents the composite oxide represented by the formula (1), B represents the composite oxide represented by the formula (2), C represents the composite oxide represented by the formula (3), D represents the composite oxide represented by the formula (4), and 0.04≦m≦0.07, 0≦n≦0.010 and 0.001≦p≦0.020.