发明名称 SEMICONDUCTOR-ON-INSULATOR (SOI) DEVICE AND RELATED METHODS FOR MAKING SAME USING NON-OXIDIZING THERMAL TREATMENT
摘要 A method for making a semiconductor device may include forming, on a first semiconductor layer of a semiconductor-on-insulator (SOI) wafer, a second semiconductor layer comprising a second semiconductor material different than a first semiconductor material of the first semiconductor layer. The method may further include performing a thermal treatment in a non-oxidizing atmosphere to diffuse the second semiconductor material into the first semiconductor layer, and removing the second semiconductor layer.
申请公布号 US2016093639(A1) 申请公布日期 2016.03.31
申请号 US201514964648 申请日期 2015.12.10
申请人 STMICROELECTRONICS, INC. 发明人 MORIN PIERRE;LIU QING;LOUBET NICOLAS
分类号 H01L27/12;H01L29/161;H01L29/16;H01L27/092;H01L29/06 主分类号 H01L27/12
代理机构 代理人
主权项
地址 Coppell TX US