| 摘要 |
When an electrode (29) of, inter alia, a grid to which a negative voltage is applied is installed in front of an objective lens (23), low-energy electrons among the secondary electrons (25) generated from a sample (24) by an electron beam, etc., are reflected by the electrode and made incident on a detector (22) installed on the sample (24) side. However, high-energy electrons are not reflected by the electrode, and are accordingly not detected by the detector. The present invention makes it possible for secondary electrons to be discriminated by energy, and only the low-energy side is detected. It is therefore possible to obtain detection signals that include, e.g., rich data on the surface state of the sample. |
