发明名称 電子線照射装置
摘要 In an X-ray generator using an ultraviolet laser, the generation of the X-ray is stabilized. In an X-ray generation method for irradiating an ultraviolet laser beam emitted from an ultraviolet laser beam generator on an ultraviolet laser beam receiving surface of an electron beam emitting device, irradiating an electron beam emitted from an electron beam emitting surface of the electron beam emitting device distinguished from the ultraviolet laser beam receiving surface on a metal piece and generating an X-ray from the metal piece, denaturalization of substance of the ultraviolet laser beam receiving surface is prevented by controlling the ultraviolet laser beam.
申请公布号 JP5895300(B2) 申请公布日期 2016.03.30
申请号 JP20120523921 申请日期 2011.07.07
申请人 株式会社BSR 发明人 石田 稔幸
分类号 H05G2/00 主分类号 H05G2/00
代理机构 代理人
主权项
地址