Method and system for pump priming

摘要

Systems and methods relating to filtration in a pump are described. Even more particularly, systems and methods relate to optimizing operating routines of a pump based on the filter used with the pump. A system controlling a pump can receive filter information and process fluid information and select a priming routine for the filter based on the filter information and process fluid information. The pump can be operated according to the selected priming routine that includes a back pressure step to pressurize the filter from downstream. Systems and methods relating to filtration in a pump are described. Even more particularly, systems and methods relate to optimizing operating routines of a pump based on the filter used with the pump. A system controlling a pump can receive filter information and process fluid information and select a priming routine for the filter based on the filter information and process fluid information. The pump can be operated according to the selected priming routine that includes a back pressure step to pressurize the filter from downstream.

主权项

1. A pump for semiconductor manufacturing comprising:
one or more motors to draw fluid into an inlet of the pump and dispense fluid from an outlet of the pump; a removable filter disposed in a fluid flow path between the pump inlet and the pump outlet; a pump controller configured to select a priming routine from a set of priming routines based on a filter type and process fluid, wherein the set of priming routines comprises: a first priming routine that includes a forward pressurization segment for a first type of removable filter; and a second priming routine that includes a back pressurization segment for a second type of removable filter; wherein the controller is configured to control the pump to perform the selected priming routine to prime the removable filter.