Thermal processing apparatus for thermal processing substrate and positioning method of positioning substrate transfer position

摘要

A substrate holder positioning method, capable of positioning a substrate holder without using any positioning jig, includes: measuring a first position of a substrate held on a substrate holder included in a substrate carrying mechanism; carrying the substrate held on the substrate holder to a substrate rotating unit for holding and rotating the substrate; turning the substrate held by the substrate rotating unit through a predetermined angle by the substrate rotating unit; transferring the substrate turned by the substrate rotating unit from the substrate rotating unit to the substrate holder; measuring a second position of the substrate transferred from the substrate rotating unit to the substrate holder; determining the position of the center of rotation of the substrate rotating unit on the basis of the first and the second position; and positioning the substrate holder on the basis of the position of the center of rotation.

主权项

1. A thermal processing apparatus for thermal processing a substrate comprising:
a cooling plate that is configured to be movable between a first position and a second position, and to cool a substrate which is placed on the cooling plate, the cooling plate having a width and a length greater than a diameter of the substrate, with the first position being a position where the substrate is carried in and carried out; a heating plate for heating the substrate which has been cooled and transferred from the cooling plate, the heating plate having a circular shape of a diameter greater than a diameter of the substrate, with the second position being a position above the heating plate; and a support plate non-movably disposed in a position below the first position, the support plate having a plurality of support members for supporting the substrate thereon, the support members being configured to be brought into contact with an edge of the substrate to restrict horizontal displacement of the substrate so as to locate the substrate at a position where a center of the substrate is aligned with a center of the cooling plate positioned in the first position.