Vibrator element, manufacturing method of vibrator element, sensor unit, and electronic apparatus

摘要

A vibration gyro-element includes a base portion, an excitation vibrating arm and a detection vibrating arm extending from the base portion, and a first adjustment vibrating arm and a second adjustment vibrating arm extending from the base portion and vibrating along with excitation vibration of the excitation vibrating arm, wherein an output signal of the first adjustment vibrating arm at least is out of phase with respect to an output signal of leakage vibration of the detection vibrating arm, and wherein an amplitude of the output signal of the first adjustment vibrating arm is larger than an amplitude of the output signal of the second adjustment vibrating arm.

主权项

1. A vibrator element comprising:
a base portion; an excitation vibrating arm and a detection vibrating arm extending from the base portion; and a first adjustment vibrating arm and a second adjustment vibrating arm extending from the base portion and vibrating along with excitation vibration of the excitation vibrating arm, wherein an output signal of the first adjustment vibrating arm at least is in an opposite phase with respect to an output signal of leakage vibration of the detection vibrating arm, and wherein when a vibration frequency of the first adjustment vibrating arm is indicated by ftu1, a vibration frequency of the second adjustment vibrating arm is indicated by ftu2, a vibration frequency of the excitation vibrating arm is indicated by fk, and Δf1=|fk−ftu1| and Δf2=|fk−ftu2|, Δf1<Δf2 is satisfied.