Micro pick up array alignment encoder

摘要

Micro pick up arrays and methods for transferring micro devices from a carrier substrate are disclosed. In an embodiment, a micro pick up array alignment encoder detects relative position between a micro pick up array having an encoder scale and a target substrate having a corresponding reference scale. In an embodiment, the micro pick up array alignment encoder facilitates alignment of the micro pick up array with the target substrate.

主权项

1. A micro pick up array comprising:
a base substrate; an array of electrostatic transfer heads on the base substrate, the array of electrostatic transfer heads supported by the base substrate, each electrostatic transfer head to receive electrostatic voltage to generate an electrostatic gripping force; and an encoder scale on the base substrate, wherein the encoder scale is spaced apart from the array of electrostatic transfer heads.