PATTERNING METHOD AND METHOD FOR MANUFACTURING WIRE GRID POLARIZER BY USING THE SAME

摘要

The present invention relates to a pattern forming method and a method to manufacture a wire grid polarizer by using the same, capable of forming a guide pattern, minimizing a non-pattern area, by using double patterning, selectively performing surface treatment on each of a surface property of a side of the guide pattern and a surface property of a floor panel exposed between guide patterns so that the surface properties become different, and then forming a block copolymer pattern between the guide patterns by using a self-assembly property of a block copolymer.