| 摘要 |
In the present invention, during a position offset detection operation, a hand of a conveyance mechanism moves to a true target position of a substrate support part. A substrate supported at a reference position that has been set in advance by the substrate support part is received by the hand of the conveyance mechanism. The positional relationship between the hand and the substrate received by the hand is detected by a position detection unit. The amount of offset between the reference position and the true target position of the substrate support part is acquired on the basis of the detected positional relationship. A warning is outputted if the amount of offset acquired is greater than a threshold value set in advance. |
