| 发明名称 |
GRAPHITE SUSCEPTOR |
| 摘要 |
Embodiments described herein include a susceptor for semiconductor processing including an oriented graphite plate that may have a thickness of at least 1 mm. The susceptor may have a support member, and the oriented graphite plate may be disposed on the support member. The support member may have a center thermal conduit and an edge thermal conduit, and may be substantially solid between the center thermal conduit and the edge thermal conduit. |
| 申请公布号 |
US2016083840(A1) |
申请公布日期 |
2016.03.24 |
| 申请号 |
US201514863063 |
申请日期 |
2015.09.23 |
| 申请人 |
Applied Materials, Inc. |
发明人 |
RAO PREETHAM;Iyer Subramani;Shah Kartik;Behdjat Mehran |
| 分类号 |
C23C16/458;C23C16/46 |
主分类号 |
C23C16/458 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A substrate support, comprising:
a support member; and an oriented graphite plate having a thickness of about 1 mm to about 10 mm disposed on the support member. |
| 地址 |
Santa Clara CA US |
