APPARATUS AND METHODS TO CREATE AN INDIUM GALLIUM ARSENIDE ACTIVE CHANNEL HAVING INDIUM RICH SURFACES

摘要

Transistor devices having indium gallium arsenide active channels, and processes for the fabrication of the same, that enables improved carrier mobility when fabricating fin shaped active channels, such as those used in tri-gate or gate all around (GAA) devices. In one embodiment, an indium gallium arsenide material may be deposited in narrow trenches which may result in a fin that has indium rich surfaces and a gallium rich central portion. These indium rich surfaces will abut a gate oxide of a transistor and may result in high electron mobility and an improved switching speed relative to conventional homogeneous composition indium gallium arsenide active channels.