| 摘要 |
A pressure sensor with a ceramic base body, a measuring membrane connected to the base body forming a measuring chamber, and an electromechanical converter that serves to convert a pressure-related deformation of the measuring membrane into a primary electrical signal. The pressure sensor is characterized by a low thermal measuring error, especially during temperature changes, due to the base body consisting of a ceramic material with high thermal conductivity, especially a thermal conductivity greater than or equal to 50 W/mK. |
