PROCESS FOR MANUFACTURING SELF-ASSEMBLED BLOCK COPOLYMER FILMS

摘要

Self-assembled block copolymer films having two or more blocks are manufactured by distributing a solution containing at least one block copolymer onto the substrate so as to partially coat a substrate surface, obtaining an intermediate product. A block copolymer is self-assembled by heating the intermediate product. The self-assembling step includes Rapid Thermal Processing, which is performed by heating the intermediate product up to a first target temperature, ranging from a glass transition temperature to an order-disorder transition temperature of the block copolymer, through a temperature rising ramp having a rate of temperature change not lower than 5° C./second; maintaining the intermediate product at the target temperature for a time interval not longer than 60 minutes, whereby a sample is obtained on the surface of which a self-assembled film of the block copolymer has been made; and cooling the sample down to the ambient temperature through a temperature descending ramp.

主权项

1. Process for manufacturing self-assembled block copolymer films, having two or more blocks, comprising the following steps:
A. having a substrate; B. distributing a first solution containing at least one block copolymer onto the substrate so as to at least partially coat a surface of the substrate, obtaining a first intermediate product; C. making a step of self-assembling said at least one block copolymer by heating the first intermediate product;where the self-assembling step C is made through a first RTP process of Rapid Thermal Processing comprising the following substeps:
C.1 heating the first intermediate product up to a first target temperature, ranging from a glass transition temperature Tg of said at least one block copolymer to an order-disorder transition temperature TODT of said at least one block copolymer, through a first temperature rising ramp having a first rate of temperature change not lower than 5° C./second; C.2 maintaining the first intermediate product at said first target temperature for a first time interval not longer than 60 minutes, whereby a sample is obtained on the surface of which a self-assembled film of said at least one block copolymer has been made; C.3 cooling the sample down to the ambient temperature through a first temperature descending ramp.