Plasma Generator With at Least One Non-Metallic Component

摘要

A plasma generator for an ion implanter is provided. The plasma generator includes an ionization chamber for forming a plasma that is adapted to generate a plurality of ions and a plurality of electrons. An interior surface of the ionization chamber is exposed to the plasma and constructed from a first non-metallic material. The plasma generator also includes a thermionic emitter including at least one surface exposed to the plasma. The thermionic emitter is constructed from a second non-metallic material. The plasma generator further includes an exit aperture for extracting at least one of the plurality of ions or the plurality of electrons from the ionization chamber to form at least one of an ion beam or an electron flux. The ion beam or the electron flux comprises substantially no metal. The first and second non-metallic materials can be the same or different from each other.

主权项

1. A plasma generator for an ion implanter, the plasma generator comprising:
an ionization chamber for forming a plasma that is adapted to generate a plurality of ions and a plurality of electrons, an interior surface of the ionization chamber being exposed to the plasma and constructed from a first non-metallic material; a thermionic emitter including at least one surface exposed to the plasma, the thermionic emitter being constructed from a second non-metallic material; and an exit aperture for extracting at least one of the plurality of ions or the plurality of electrons from the ionization chamber to form at least one of an ion beam or an electron flux, wherein the ion beam or the electron flux comprises substantially no metal.