| 发明名称 |
Micro Heater and Micro Sensor and Manufacturing Methods Thereof |
| 摘要 |
A micro heater and a micro sensor is capable of providing a heater having a small thermal capacity by forming an air gap which surrounds the heater wire, and forming the heater wire on a porous substrate. |
| 申请公布号 |
US2016084787(A1) |
申请公布日期 |
2016.03.24 |
| 申请号 |
US201514864184 |
申请日期 |
2015.09.24 |
| 申请人 |
Point Engineering Co., Ltd. |
发明人 |
Ahn Bum Mo;Park Seung Ho;Byun Sung Hyun |
| 分类号 |
G01N27/12;H05B3/28;H05B3/03 |
主分类号 |
G01N27/12 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A micro heater comprising:
a porous substrate; and a heater electrode which is formed on said porous substrate and includes a heater wire and a heater electrode pad which is connected to said heater wire, wherein an air gap which surrounds said heater wire is formed in said porous substrate. |
| 地址 |
Asan-si KR |
