| 摘要 |
In one embodiment, a shower head for a deposition system is provided. The shower head comprises: a gas injection plate provided with a plurality of gas injection holes extending in the thickness direction; and a gas supply section that provides a plurality of flow paths that guide gas to the plurality of gas injection holes from a common flow path, each of the plurality of flow paths having one end connected to the common flow path and another end. Among the flow paths, any two flow paths that satisfy the condition of a first linear distance between the arranged positions of the ends of one flow path being shorter than a second linear distance between the arranged positions of the ends of the other flow path have a relationship wherein the difference between the length of the one flow path and the first linear distance is larger than the difference between the length of the other flow path and the second linear distance. |
