发明名称 PIEZOELECTRIC DRIVE DEVICE, ROBOT, AND DRIVE METHOD THEREFOR
摘要 PROBLEM TO BE SOLVED: To solve such a problem that wear of a protrusion is concentrated at a position where the protrusion is in contact with a driven body and thereby, the protrusion is excessively depleted.SOLUTION: A piezoelectric drive device includes a diaphragm, a first piezoelectric vibrator arranged on a first surface of the diaphragm, a second piezoelectric vibrator arranged on a second surface of the diaphragm, and a protrusion provided on the diaphragm and in contact with a driven body. The first piezoelectric vibrator and the second piezoelectric vibrator have asymmetry property and are asymmetrical to each other with respect to the diaphragm.SELECTED DRAWING: Figure 3
申请公布号 JP2016040992(A) 申请公布日期 2016.03.24
申请号 JP20140164630 申请日期 2014.08.13
申请人 SEIKO EPSON CORP 发明人 HASHIMOTO TAIJI
分类号 H02N2/00;B25J17/00;H01L41/053;H01L41/09 主分类号 H02N2/00
代理机构 代理人
主权项
地址