| 摘要 |
PROBLEM TO BE SOLVED: To provide a suitable configuration of a small piezoelectric drive device.SOLUTION: A piezoelectric drive device includes a first piezoelectric vibrator having a first piezoelectric element, a first diaphragm where the first piezoelectric vibrator is provided, a first wiring line connected to the first piezoelectric element and formed on the first diaphragm, and a flexible substrate where a second wiring in contact with the first wiring is formed.SELECTED DRAWING: Figure 13 |
