摘要 |
A stage apparatus is provided with a fixed section having a prescribed moving surface, and a first moving body which can move along the moving surface in a plurality of directions including a first direction. The stage apparatus is also provided with substages which move in a first direction to the moving surface in a synchronization with movement of the first moving body; a first measuring apparatus, which is arranged on the substages at least partially and detects information relating to relative position in the first direction between the substages and the moving surface; and second measuring apparatuses, which are arranged on the substages at least partially and detect information relating to relative position in a second direction which substantially orthogonally intersects with the first direction between the substage and the first moving body and is along the moving surface. |