| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for evaluating a semiconductor device, capable of achieving sufficient detection accuracy of a partial discharge with a simple configuration.SOLUTION: The method for evaluating a semiconductor device comprises: an evaluation step of evaluating electrical characteristics of a semiconductor device; a step of detecting the temperature of the semiconductor device by using a temperature monitor element attached to the semiconductor device during the evaluation step; a step of, when the detected temperature of the semiconductor device exceeds a predetermined threshold, determining that a discharge has occurred in the semiconductor device of which the temperature is detected; and a step of identifying a discharge point in the semiconductor device in which it is determined that the discharge has occurred. |
