Semiconductor device, test structure of the semiconductor device, and method of testing the semiconductor device

摘要

A semiconductor device, a test structure of the semiconductor device, and a method of testing the semiconductor device are provided. The test structure including a first pad and a second pad being separated from each other, and a first test element and a second test element connected between the first pad and the second pad, a first value of a characteristic parameter of the first test element being different from a second value of the characteristic parameter of the second test element, may be provided.

主权项

1. A test structure of a semiconductor device, the test structure comprising:
a first pad and a second pad separate from each other; and a first test element and a second test element connected between the first pad and the second pad, a first value of a characteristic parameter of the first test element being different from a second value of the characteristic parameter of the second test element, wherein the first and second values are random values selected by an algorithm, which is configured to generate the random values in a statistically meaningful manner, or based on experimental values obtained by a design of experiments (DOEs).