| 摘要 |
PROBLEM TO BE SOLVED: To efficiently improve a manufacturing line by detecting malfunction early.SOLUTION: An inspection device according to an embodiment includes an irradiation unit, an imaging unit, and a control unit. The irradiation unit has light emitting elements arranged in series, which emit ultraviolet light to a substrate on a main surface where at least a light emitting layer of an organic EL layer is formed. The imaging unit captures an image of a predetermined region of the substrate irradiated with ultraviolet light. The control unit detects malfunction of the substrate on the basis of the image captured by the imaging unit.SELECTED DRAWING: Figure 8 |
