| 摘要 |
PROBLEM TO BE SOLVED: To obtain a correct X-ray reflectance profile in a short time.SOLUTION: An X-ray reflectance measurement device comprises: an X-ray intensity detector 9 for detecting the intensity of a reflection X-ray 6 reflected by a sample 5 placed on a sample table 4; a beam position detector 17 provided on the sample side relative to the X-ray intensity detector, for detecting the beam position of the reflection X-ray; a detector rotation mechanism 7 for rotating the X-ray intensity detector and the beam position detector integrally; a sample table rotation mechanism 3 for rotating the sample table in an inclination direction; and a computer 13 for controlling the detector rotation mechanism and also controlling the sample table rotation mechanism on the basis of the beam position detected by the beam position detector, and obtaining an X-ray reflectance profile on the basis of the X-ray intensity detected by the X-ray intensity detector.SELECTED DRAWING: Figure 1 |
