Dual-probe scanning probe microscope

摘要

An apparatus and method of positioning a probe of an atomic force microscope (AFM) includes using a dual probe configuration in which two probes are fabricated with a single base, yet operate independently. Feedback control is based on interaction between the reference probe and surface, giving an indication of the location of the surface, with this control being modified based on the difference in tip heights of the two probes to allow the sensing probe to be positioned relative to the sample at a range less than 10 nm.

主权项

1. A method of positioning a probe of an atomic force microscope (AFM) relative to a sample, the method comprising:
providing a probe assembly including two probes, a reference probe having a tip with a height, h1, and an imaging probe having a tip with a different height, h2, wherein a mechanical path between the reference probe and the sample and the imaging probe and the sample is the same; detecting a surface of the sample using the reference probe; tracking the surface based on the detecting step using a feedback controller having a setpoint; and changing the setpoint based on a known difference between h1 and h2 to position the imaging probe tip relative to the sample; wherein h1>h2.