发明名称 SUBSTRATE LAMINATION DEVICE AND SUBSTRATE LAMINATION METHOD
摘要 PROBLEM TO BE SOLVED: To solve the problem in which: a void may remain in a laminate laminated with a substrate.SOLUTION: A substrate lamination device laminates a first substrate including a first region used as an electric conduction path and a second region not used as the electric conduction path on a second substrate different from the first substrate. The substrate comprises a pressurization unit in which a recess formed in the region including a structure in the first substrate pressurizes the first and second substrates superposed with each other by the pressure for bringing the first substrate into contact with the surface facing the first substrate in the second substrate.SELECTED DRAWING: Figure 15
申请公布号 JP2016039272(A) 申请公布日期 2016.03.22
申请号 JP20140162074 申请日期 2014.08.08
申请人 NIKON CORP 发明人 SUGAYA ISAO
分类号 H05K3/46;H01L21/02 主分类号 H05K3/46
代理机构 代理人
主权项
地址