| 摘要 |
PROBLEM TO BE SOLVED: To provide a film formation material having high heat stability and long-term storage stability, which is a film formation material, especially, which is liquid at room temperature or has a low melting point and rich stability, and which can perform stable supply of a raw material, and can form stably a high-quality film.SOLUTION: A film formation material is shown by a compound represented by LM(OR)[L is a cyclopentadienyl group or a substituted cyclopentadienyl group. M is Ti, Zr or Hf. R is an alkyl group. Each R may be the same or different.].SELECTED DRAWING: Figure 1 |
